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dc.contributor.authorUrey, H
dc.contributor.authorKan, C
dc.contributor.authorDavis, WO
dc.date.accessioned2022-03-10T19:33:10Z
dc.date.available2022-03-10T19:33:10Z
dc.date.issued2005
dc.identifier.issn0960-1317
dc.identifier.issn1361-6439
dc.identifier.urihttps://doi.org/10.1088/0960-1317/15/9/013
dc.identifier.urihttps://hdl.handle.net/20.500.14065/3107
dc.description.abstractA torsional scan mirror suspended with two flexure beams can be used in various display, imaging and other scanning applications. Using various mirror shapes and flexure dimensions as parameters, a set of analytical formulae is presented to predict the natural frequency of the first five vibration modes, which are torsion, in-plane and out-of-plane sliding modes and in-plane and out-of-plane rocking modes. Mode frequencies are compared with the finite element model (FEM) predictions using ANSYS (TM) for a wide range of flexure beam dimensions. The formulae include the effective inertia of the flexure beams and orthotropic material anisotropy effects. The analytical formulae are verified for both isotropic (e.g. steel) and orthotropic (e.g. silicon) materials. These formulae work very well when the Euler-Bernoulli beam theory assumptions and the rigid miffor assumption are satisfied. The accuracy of analytical predictions is improved by introducing an empirical correction factor to the analytical predictions using non-dimensional flexure beam ratios. The correction factor reduces the error between analytical formulae and FEM predictions to within a few per cent for all five modes for a large range of flexure dimensions. FEM predictions and analytical formulae are partly verified by experimental results.en_US
dc.language.isoengen_US
dc.publisherIop Publishing Ltden_US
dc.relation.ispartofJournal of Micromechanics and Microengineeringen_US
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.subjectShear Coefficienten_US
dc.subjectBending Solutionsen_US
dc.subjectYoungs Modulusen_US
dc.subjectMemsen_US
dc.subjectSiliconen_US
dc.subjectDesignen_US
dc.titleVibration mode frequency formulae for micromechanical scannersen_US
dc.typearticleen_US
dc.departmentUfuk Üniversitesien_US
dc.identifier.doi10.1088/0960-1317/15/9/013
dc.identifier.volume15en_US
dc.identifier.issue9en_US
dc.identifier.startpage1713en_US
dc.identifier.endpage1721en_US
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.authorwosidUrey, Hakan/K-2338-2019
dc.identifier.wosWOS:000232234500026en_US


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